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Background
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Energy Dispersive X-Ray Micro Analyzer
- +SEM/TEM
- Elemental composition
X-Ray Analytical Microscope
- 10, 100µm resolution
- Elemental composition/structure in ambient condition
Scanning Chemical Microscope
- Proton in Electrolyte
- pH Imaging with 100µm resolution.
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We have been involved in developing technologies
for analyzing elemental composition of solid samples with a microscopic resolution,
such as an energy-dispersed X-ray micro-analyzer(EMAX) and a X-ray analytical
microscope(XGT). The former, connected to SEM or TEM electron microscopes, visualize
elemental distribution of the sample with the same resolution as SEM or TEM. The
latter, which is relatively new technology of us, enables simultaneous analysis
of the elemental and structural composition of samples and then, visualizes them.
Although the resolution is lower than the former, the sample is tested neither
with any electrical coating nor lower pressure.
Besides these microscopic imaging technology, we have developed a new microscopic
imaging technology for observing distribution of chemical species in solution
and then, we are searching for possible applications. We have named this analyzer
as " scanning chemical microscope". Proton, which is one of most important
chemical species in electrolyte, is object of the measurement in case of this
microscope. Distribution of pH in the electrolyte can be visually shown with 100
micron resolution using this microscope. Though the object of measurement is proton
in the electrolyte, we have found that the solid samples, which are measured by
these analyzers above, can also be analyzed and evaluated from a different point
of view using this microscope. As such this morning, I will present our new microscope
and propose a new concept of the chemical analysis of slid sample attained by
pH imaging using this microscope. .
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