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Scanning Chemical Microscope
- Electrochemical-Semiconductor Flat pH Sensor.
- Multiple Points of pH Measurements.
- Visualization of Localized pH Distribution.
- 50 µm resolution
- 0.01 pH sensitivity
- 25 sec for 6.4 mm x 6.4 mm (1 sec for 10 mm)
Next, I would like to outline our Scanning Chemical
Microscope. This microscope utilizes a flat pH sensor, which we call "pH
imaging sensor", that can be made function as an array of point sensors based
on an electrochemical-semiconductor principle when aided by the light illumination
from the backside. Measured pH values at each measurement point are processed
to be a pH image. So far, a resolution of 5µm with 0.01 pH sensitivity has been
attained by this pH imaging technology. However, in practical application, pH
imaging is made with 50 to 200µm resolution. The time required for obtaining a
single pH image depends on the size of the measured area and resolution of the
image. For example, a 6.4 mm by 6.4 mm image with a resolution of 100µm can be
obtained in 25 sec. We can also measure just the liner profile once we have identified
the regions of interest. In this case, a profile 1cm long can be obtained at a
speed of 1cm/sec.
Moreover, the sensor can theoretically be made sensitive to chemical substances
or ions other than protons for pH detection by modifying the sensing surface.
This is why we refer to our microscope as a "Chemical Microscope". However,
we have been involved in only the proton sensitive sensor so far. Since pH is
one of the most important properties of a solution, imaging of the pH distribution
has wide variety of application we regard. |
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