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SEMICON Japan 2007
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• HORIBA  • HORIBA STEC  • HORIBA JOBIN YVON
• HORIBA Advanced Techno
Lithography
 Particle Detection
• 
Reticle/Mask Particle Detection System New!
 
PR-PD2 HR
• 
Reticle/Mask Particle Detection System
 
PR-PD2
• 
Reticle/Mask Particle Detection System
 
PR-PD3
• 
FPD Mask Particle Detection System
 
PR-PD4
• 
Reticle/Mask Particle Detection System
 
PR-PD5
 Trace Gas Measurement
• 
Trace Ammonia Gas Monitor
 
CG-1000
   
   
UP
Deposition & Etching
 Gas Control
• 
Mass Flow Module
 
CRITERION D200
• 
Pressure Insensitive Mass Flow Controller
 
SEC-Z700
• 
Multi Range Multi Gas Digital Mass Flow Controller
 
SEC-Z500X
• 
Ratio Controller
 
FS-100
• 
DeviceNet™ Auto Pressure Regulator
 
UR-Z700
• 
Wafer back side cooling system
 
GR-300
 Liquid Control
• 
Digital Liquid Mass Flow Meter/Controller
 
LF-F/LV-F
• 
Mixed Injection
 
MV-1000/MI-1000
• 
Direct Injection
 
VC-1000
• 
Compact Baking System
 
LSC-A100
• 
Liquid Auto Refill System
 
LU-A1100
 Vacuum Control
• 
Residual Gas Analyzer
 
RGA/MICROPOLE™ System
   
 Film Thickness Measurement
• 
Full Automatic Ultra Thin Film Analyzer
 
UT-300
 
• 
UV-Visible Ellipsometer
 
MM-16
 Stress Measurement
• 
Full Automatic Raman Analyzer
 
FR-3000
• 
Thumb-size Scanning Electron Microscope
 
• 
Surface Finisher New!
 
TENSEC
 Material Analysis
• 
Raman Spectroscopy System
 
LabRAM HR-800
 
• 
Glow Discharge Optical Emission Spectroscopy
 
GD-Profiler2
 End-point Monitor
• 
Plasma Diagnosis End-point Monitor
 
DigiCPM_J
 
• 
Real Time Interferometric Film Thickness Monitor
 
DIGILEM-CPM-Xe/Halogen
 Gas Monitoring
• 
FTIR Gas Analyzer
 
FG-100A
 
• 
In-line Gas MonitorNew!
 
IR-200
UP
Wet Cleaning
• 
Fiber Type Chemical Solution Concentration Monitor
 
CS-100F1
• 
Chemical Solution Concentration Monitor
 
CS-100/100F1 Series
• 
Hydrofluoric Acid monitorNew!
 
CM-200A/210A Series
• 
Chemical Solution Concentration Monitor
 
CS-100
• 
IPA Gas Monitor
 
IR-150AS
• 
Low-concentration type HF/HCl/NH3 Concentration Monitor
 
HF-960M
• 
HF Concentration Monitor
in Diluted sulfuric acid/Hydrogen peroxide New!
 
HF-700
• 
Carbon Sensor Resistivity Meter
 
HE-960R-GC
• 
Carbon Sensor Conductivity Meter
 
HE-960HS
• 
TMAH Conductivity Meter
 
HE-960TM
• 
In Line Type Dissolved Ozone Monitor
  HZ-960i
UP
Utility
• 
Airborne Molecular Contaminants Monitor New!
 
TG-500 Series
• 
High-sensitivity Silica Monitor
 
SLIA-300
• 
Portable DO Monitor
 
SD-300


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