Semiconductor Product List
Categories
Material Analysis
Lithography Process
DI Water Analysis (Wet Process)
Material Analysis (Particulates Analysis & Defect Analysis)
Chemical Analysis (Wet Process)
Gas Control/Analysis (Dry Process)
Process Monitoring (Dry Process)
Thin Film Control/Analysis
CMP Process
Drain Water Analysis
Ambient Monitoring in Clean Room
FPD Product List
Photovoltaic Product List
Material Analysis
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Photoluminescence Spectrophotometer
Cathode Luminescence Measuring Equipment
MP Series
Lithography Process
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Trace Ammonia Gas Monitor
CG-1000
Reticle/Mask Particle Detection System
PR-PD2
Reticle/Mask Particle Detection System
PR-PD3
DI Water Analysis (Wet Process)
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In-line Particle Sensor (Ultra-pure Water)
PLCA-800
Silica Monitor
SLIA-300
Silica Analyzer
SLIA-2000
Dissolved Oxygen Monitor
SD-300
Resistivity Meter
OE-96R
Resistivity Meter
OE-960CE
Material Analysis (Particulates Analysis & Defect Analysis)
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Energy Dispersive X-ray Analyzer
EMAX ENERGY
X-ray Microscope
XGT-5000
Glow Discharge Optical Emission Spectroscopy
JY-5000RF
Raman Spectrophotometer
Chemical Analysis (Wet Process)
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Fiber Optic Type Chemical Solution Concentration Monitor
CS-100F1 Series
SC-1 Monitor
CS-131
SC-2 Monitor
CS-152
SPM Monitor
CS-150
BHF Monitor
CS-137
HF/HNO
3
Monitor
CS-153N
FPM Monitor
CS-153
TMAH/H
2
O
2
Monitor
CS-139E
Hydrofluoric Acid Monitor
CM-200/210
In-line Particle Sensor (Chemicals/Resist)
PLCA-800
In-line Type Dissolved Ozone Monitor
OZ-96i
Dissolved Ozone Monitor
OZ-96
Hydrofluoric Acid Resistant pH Meter
CP-480
pH Meter for Slurry
OP-96F
Slurry Monitor
DE-100
IPA Resistivity Meter
IP-960
IPA Gas Concentration Monitor
IR-150AS
Two-channel Conductivity Meter
OE-96CW
Carbon Sensor Conductivity Meter
CE-480C-GC
TMAH Conductivity Meter
CEH-480TM
Ammonia Concentration Meter
ON-96
Digital Liquid Mass Flow Meter
LF Series
Digital Liquid Mass Flow Controller
LV Series
Gas Control/Analysis (Dry Process)
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FTIR Gas Analyzer
FG-100A series
In-line Gas Monitor
IR-150
Auto Pressure Regulator
UR-7300 Series
Direct injection
VC Series
Mass flow controllers
SEC-4001 Series
Mass flow controllers
SEC-8000 Series
Digital Mass Flow Controller
SEC-Z/F/V Series
DeviceNet™ compatible digital mass flow controllers
SEC-Z10D Series
Compact baking system
LSC-A100 Series
Process Monitoring (Dry Process)
TOP
Residual Gas Analyzer
MICROPOLE™ System
Capacitance Manometers
VG Series
Thin Film Control/Analysis
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Real Time Interferometric Process Monitor
LEM-CT-670-G50/G120
DIGILEM-CPM-Xe/Halogen
Plasma Diagnosis Endpoint Monitor
DigiCPM_J
Full Automatic Spectroscopic Ellipsometer
UT-300
UV-Visible Ellipsometer
UVISEL
Infrared Spectroscopic Ellipsometer
ex-situ IREL
CMP Process
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Particle Size Distribution Analyzer
LA-920
Dynamic Light Scattering Particle Size Distribution Analyzer
LB-550
Drain Water Analysis
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Fluoride Ion Monitor
FLIA-101
Total Nitrogen/Total Phosphorus Measurement System
TPNA-300
Ambient Monitoring in Clean Room
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Ambient Gas Monitor AP Series
APOA-370
Ambient Gas Monitor AP Series
APNA-370
Event
PV Japan 2008
2008/07/30
News
Introducing New Particle Size Analyzer (LA-950V2)
2007/08/22
HORIBA, Ltd. Announces the Grand Opening of the “HORIBA Technology Center” in Santa Clara, California.
2007/07/05
HORIBA Ltd. is ready for when the China RoHS is introduced this coming spring with our multiple model lineup with microanalysis capability and higher sensitivity
2007/02/27
Second Chinese Plant Completed in Shanghai to Step up Production in China
2006/09/27
The 2006 Masao Horiba Awards: Announcement of Prizewinners/Awards Ceremony to Be Held on October 17
2006/08/22
Information on Relevant Technologies
HORIBA Group Technology Matrix
Technical Consultation
Technical consultations on the semiconductor related products of HORIBA are being accepted.
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