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Trace Ammonia Gas Monitor CG-1000
CG-1000
Specifications
External Dimensions, Process Flow
Measurement data example
Related Products
Trace Ammonia Gas Monitor
CG-1000
Related Products
Reticle/mask pattern surface
Advanced Multi-Function Type for Detection of Minute Foreign Particles of Down to 0.35μm
Reticle/Mask Particle Detection System
PR-PD2
l Detection sensitivity of 0.35μm for foreign particles on pattern surfaces l Compatibility with all types of stepper case (suitable for multi-level cases) l Compatibility with three types of reticle thanks to a changeable fork size
Light source
488 nm, 10 mW argon laser
Detection ability
Pattern surface: 0.35μm
Glass surface: 5.0μm
Pellicle surface: 10.0μm
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