Trace Ammonia Gas Monitor
CG-1000
Measurement data example
Comparison with Ion Chromatography
In current clean room analyses of ammonia gas, a widely used method involves collecting the gas with an impinger for subsequent analysis by ion chromatography (IC). HORIBA performed a test comparison of this IC approach and the CG-1000 using a standard ammonia gas cylinder.
Diagram 1 above shows the data resulting from the comparison, while Diagram 2 indicates the test process. Dilute sulfuric acid (0.5 mM) was used in the absorbing solution for the impinger.
From this data, it can be seen that a strong correlation is obtained even in a low concentration range of 10 ppb or less.
Real-time Measurement
The data represents a measurement of atmospheric gas in a clean room using the CG-1000. It can be assumed from the results that having people near the unit causes the ammonia concentration to fluctuate.
Ammonia Filter Breakthrough Test
Several hundred parts per billion of ammonia gas were introduced into the filter, and monitoring was performed at the filter outlet using the CG-1000. From the rise in the ammonia concentration shown in this data, it is possible to establish the breakthrough point of the filter.
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