Measurement object
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Ambient trace ammonia gas in clean rooms
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Measurement principle
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CRDS (Cavity Ring Down Spectroscopy)
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Range
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0 to 500 ppb
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Zero noise
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0.06 ppb or less (5 min. average mode over 24 hr. x σ)
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Lower detection limit
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0.1 ppb or less (30 min. average mode over 24 hr. x 3σ)
0.2 ppb or less (5 min. average mode over 24 hr. x 3σ)
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Minimum interval
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Approx. 5 sec.
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Zero drift
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±0.1 ppb/day (peak value of 50 min. average data)
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Zero return time
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60 min. or less
(Time to reach 0.2 ppb in 5 min. average mode after measuring sample gas of approx. 10 ppb)
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Coupling
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Outer diameter: 6.0 mm, shared-use: 6.35 mm,
fluorocarbon polymer
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Outputs
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Analog (concentration value)
Alarm (error, H level, HH level)
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Stand
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600 (W) x 835 (D) x 840 (H) mm (not incl. monitor, handles)
23.6 (W) x 32.9 (D) x 33.1 (H) in
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Mass
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110 kg, 242 lb
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Power supply
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100 V AC±10 V, 50/60 Hz
700 V A (max. consump.)
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Sample gas conditions
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Flow rate: 0.4 to 10 L/min
Temperature: 15 to 35°C
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