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Multi-monitoring of up to four types (chemical solution or range) with single concentration monitor.
By storing up to four calibration factors (chemical solution or range) in one monitor, you can monitor the concentrations of more than one chemical solution (or differing chemical solution ratios) in a single lot, like single-bath or single-wafer cleaning systems.
Inline measurement lets you follow the concentration in real time.
A cell unit type is also available for applications that demand accuracy.
Real-time concentration monitoring is made possible by an inline cell that directly integrates into the main piping of the cleaning system. Emphasizing stability, a cell unit type is also available that uses monitor output for feedback control. This keeps chemical solution concentrations within the permissible range and eliminates unnecessary solution changes.
Supports concentration control for 300 mm processes with approx.
3 sec. measurement cycle.
With a short measurement cycle of approximately three seconds, high-speed response is realized. Precise concentration control is possible for multi-bath, single-bath, and single-wafer cleaning systems.
Increased stability by complete isolation of electrical and measurement sections.
The use of fiber optic cables to convey light signals ensures that the concentration monitor is completely separated from the cell. Corrosion will never be a concern, because the concentration monitor can be placed away from the presence of solution fumes.
Compact and lightweight, the design saves space in wet cleaning system installations.
Taking up about two thirds the floor space of its predecessor, the compact design saves space in wet cleaning system installations. Easy integration and light weight make mounting possible even on top of the cleaning system itself.
Reduced lot failures boost yields in the cleaning process.
Cleaning with high repeatability is assured by employing monitor-output-based supply control of each chemical solution. This reduces lot failure in the cleaning process, which contributes to increased yields.
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