SC-1 monitor

The CS-131 is a high-precision chemical concentration monitor designed for use with the SC-1 solutions used in cleaning processes during semiconductor manufacturing. It offers a faster response speed and a more compact size than anything available to date, and monitors the concentrations of the various components of the SC-1 solutions (NH₃/H₂O₂/H₂O) used to remove particles and organic substances on an ongoing basis. Feedback control based on the monitor output is used to keep the concentrations of the SC-1 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. In addition, a model with an integrated cooling unit is available, allowing accommodation of a broad range of sample temperatures.

A measurement cycle of approx. 2 seconds supports concentration management for 300 mm processes
A very short measurement cycle* of approximately two seconds means fast response. Frequent feedback for both single-bath and batch type cleaning devices is supported.
*Does not include chemical replacement and cooling times.

The compact design means less space is needed for the cleaning device
Because of the compact design, only two-thirds (*) the conventional floor area is required, so less space is needed for the cleaning device. The monitor can be easily integrated with the cleaning device.
*Based on comparison with the CS-220 series by HORIBA.

Fewer lot defects in the cleaning process mean a higher yield
Output from the monitor is used for replenishment control of the SC-1 solutions, enabling cleaning with a high reproducibility rate. There are fewer defects in the cleaning process, and this helps boost the overall yield.

Fully automatic measurement and simple control
All the user has to do is prepare the SC-1 solution. Measurement is fully automatic, so no control whatsoever is required once the measurement has begun. In addition, air is used for reference spectral measurement, so a utility water supply is not needed.

Comprehensive measures to eliminate air bubbles enable measurement of high-temperature samples
Air bubbles are separated out in a bubble removing tank, while an electromagnetic valve minimizes mixing of air bubbles in the flow cell during measurement. If the monitor has an integrated cooling unit, high-temperature samples can be sent directly to the monitor. Temperature compensation is carried out automatically.

24 V DC used for higher safety assurance
Low-voltage 24 V DC is used for the power supply, offering improved safety and protection from electrical shock. An internal leakage sensor can be installed to detect water leaks, so that the supply of SC-1 solutions can be shut off in the event of an emergency.