The CS-153 is a high-precision chemical concentration monitor developed specifically to meet the increasingly stringent requirements of the semiconductor cleaning process. It measures, in real time, the concentrations of the components of FPM solution (HF,H₂O₂, and H₂O), which is used to remove metallic ions and natural oxidation films during the semiconductor cleaning process.

An alarm notifies the operator when FPM solution is added to the bath.
This not only helps the operator maintain each FPM solution component within its allowable concentration range, but also eliminates the need for unnecessary replacement of liquid chemicals.

For increased safety, the power and analysis portions of the unit are separated.

Temperature-compensated, multivariate analysis for high-accuracy measurement
The CS-153 features multivariate analysis with the measurement of 36 wavelength points, as well as a temperature compensation feature.
As a result, the CS-153 provides accurate measurements that are not affected by sample temperatures.

Continuous in situ monitoring of chemical concentration eliminates unnecessary replacement of chemicals
The CS-153 continuously monitors the concentration of each FPM component and activates an alarm when FPM solution is added to the bath. This automatic monitoring assists the user in maintaining the concentration of the FPM solution within the allowable range and eliminates wasteful, unnecessary replacement of chemicals, prolonging the life of the solution.

Fully automatic measurement for simplified control
Because measurement is fully automatic, the operator has only to add FPM. No manual control operations are necessary before or after measurement. Furthermore, the CS-153 uses air for its reference spectrum measurements, so water is not required.

Two-part design maximizes safety
The chemical analysis section is divided into two separate parts, one for power and one for analysis. For increased safety, hazardous AC voltage is converted to DC voltage before being fed to the analysis section.

International power input
The AC power input works with any power outlet between 100 and 240 volts.

Sapphire flow cell is used in the optical system
The flow cell is made from sapphire to allow handling of fluoric acid.