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Control Unit FGC-10 |
Monitoring of ambient gases in clean rooms
Capable of detecting gas concentrations on the order of less than
a part per million, the FG-100A Series can be combined with a control
unit with concentration display and output functionality to enable
continuous, high-sensitivity monitoring of ambient gases in clean
rooms without the use of a computer. By switching the sampling
line, multipoint measurement can be carried out. It can be used
for the monitoring of ambient gases in clean rooms, and contributes
to EHS (Environment, Health, Safety) in the semiconductor and FPD
industries.
