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FTIR Gas Analyzer
FG-100A Series
Suitable for diverse applications
- Optimization of CVD processes (chamber cleaning, etc.) and dry etching processes
- R&D of PFC processing equipment (recovery and decomposition)
- Monitoring of abatement system performance
- Quality control of gas production processes
- Development of PFC substitutes
- Continuous monitoring of ambient gases in clean rooms
- Monitoring of MOCVD liquid and solid material gas concentrations
- Evaluation of thermal decomposition characteristics of CVD materials
Single cell model
Dual cell model
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