The FG-100A Series of FTIR gas analyzers enables the detection and measurement of a wide variety of substances, such as PFCs, greenhouse gases and semiconductor/FPD process gases, which must be reduced due to their contribution to global warming. To provide effective on-site gas measurement, we have developed single cell and dual cell models which have been made much more compact. Suitable for diverse gas measurement applications, the FG-100A Series is both easy to set up and highly portable.
The FG-100A Series is available as a total system, including software that is ideal for semiconductor/FPD process gas analysis, an extensive library, and a portable sampling unit. With expertise in environmental gas analysis built up over a period of 50 years, HORIBA technology provides gas-monitoring support for semiconductor and FPD processes.
Data sampling possible at intervals of 0.6 seconds*
"Speed Priority Mode" can be selected at the time of measurement to perform data sampling at a cycle of less than one second. This is effective for recipes that are completed in a short time and for precise verification of the behavior of exhaust gas when conditions are changed.
*Varies depending on measurement conditions.
Compact and easy-to-use in places with limited place
The FG-100A Series can be easily carried and installed in small spaces for efficient analytical performance.
Single cell and dual cell models available
Single cell and dual cell models are available. Dual cell models enable continuous monitoring, with single-touch changeover, of situations where sampling is done at two points that vary widely in concentration such as at the inlet and outlet of abatement systems. This eliminates the burden of purging and contributes to rapid and efficient gas analysis.
Line up of five cell optical path lengths for optimal matching with the gas-density sampling situation
Five cell optical path lengths are available (0.01, 0.1, 0.8, 2.4, and 10 m). Depending on the concentration in the sample, simply swap in a cell unit of appropriate optical path length to enable highly precise measurement. Cells are also available for measuring gas concentrations in a decompressed state immediately following the processing chamber.
Continuous monitoring with an optimal liquid-nitrogen-free detector
Electronically cooled MCT detectors are used to eliminate the complications of providing liquid-nitrogen inside the clean room. Continuous monitoring can be smoothly implemented.
Extensive library
More than 38 types of spectra and calibration curves for semiconductor and FPD processes are provided standard as a library. In addition, efficient gas analysis is supported with a lineup of more than 260 types of spectra.
