The IR-150 Series is a collection of in-line semiconductor gas concentration monitors that use the NDIR method (nondispersive infrared absorption). These instruments are ideal for implementing in-line control of the gas concentrations resulting from the gasification of solid and liquid materials that are used in compound semiconductor manufacturing processes, including TMAI, TMIn, TMGa, and DEZn.
- In-line design allows real-time concentration measurement
- Ideal for controlling the concentrations of MOCVD liquid and
solid material gases - Compact, mount-free design
* Please contact HORIBA as to IPA and other kind of gases
as well as applications.
