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 HOME >> Products >> Semiconductor Instruments & Systems >> FG-100A Series
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FG-100A Series
Specifications
Control Unit
Sampling Unit
Suitable for diverse applications
Flow Schematics
Typical measurement results
Dimensional Outlines
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Related product

FTIR Gas Analyzer

FG-100A Series

Dedicated sampling unit available


Optimized for semiconductor and FPD processes, a dedicated sampling unit is available. Gas samples can be easily introduced. Designed to be upgraded with the FG-100A Series system, you get a compact design that takes less space and is easy to move around with casters.

Sampling unit
Sampling unit (option) combined with the single cell model

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