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IR-150
Specifications
External dimensions
Use environment, Applications, advantage
System configuration diagram
Measurement principles
Measurement data example
Utility (setup configuration example)
Sample measurements
Technical literature
Measurement method:
Infrared analysis (NDIR method)
Gases measured:
SiH4, PH3 *production of organic alloy materials (long ~ cell model) is also possible
Measured gas densities:
10%, 20%, *contact HORIBA for other gas types and densities.
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