IPA Gas Concentration Monitor

Measures the concentration of the components in the various liquid chemical solutions used in cleaning processes, in real time, and uses alarms to notify the user when it is necessary to change the solution or when additional solution is supplied automatically. A short measurement cycle makes it possible to accurately follow solution concentration and quickly detect any changes. Inline liquid chemical concentration measurement systems (CS-100F1 series) that use optical fibers are also available.

The CM-200/210 is a compact, lightweight hydrofluoric acid monitor that is ideal for use with hydrofluoric acid dilution and wafer cleaning equipment. Immersion and circulation sensors are available.