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List by Production Process

Material Analysis Lithography Process DI Water Analysis (Wet Process)
Material Analysis (Particulates Analysis & Defect Analysis)   Chemical Analysis (Wet Process)   Gas Control/Analysis (Dry Process)
Process Monitoring (Dry Process)   Thin Film Control/Analysis   CMP Process
Drain Water Analysis   Ambient Monitoring in Clean Room    

Material Analysis
iconPhotoluminescence Spectrophotometer
iconCathode Luminescence Measuring Equipment / MP Series


Lithography Process
iconReticle/Mask Particle Detection Systemt / PR-PD2
iconReticle/Mask Particle Detection System / PR-PD3


DI Water Analysis (Wet Process)
iconIn-line Particle Sensor (Ultra-pure Water) / PLCA-800
iconSilica Monitor / SLIA-300
iconSilica Analyzer / SLIA-2000
iconDissolved Oxygen Monitor / SD-300
iconResistivity Meter / OE-96R/960CE


Material Analysis (Particulates Analysis & Defect Analysis)
iconEnergy Dispersive X-ray Analyzer / EMAX ENERGY
iconX-ray Microscope / XGT-5000
iconGlow Discharge Optical Emission Spectroscopy / JY-5000RF
iconRaman Spectrophotometer


Chemical Analysis (Wet Process)
iconFiber Optic Type Chemical Solution Concentration Monitor / CS-100F1 Series
iconSC-1 Monitor / CS-131
iconSC-2 Monitor / CS-152
iconSPM Monitor / CS-150
iconBHF Monitor / CS-137
iconHF/HNO3 Monitor / CS-153N
iconFPM Monitor / CS-153
iconTMAH/H2O2 Monitor / CS-139E
iconHydrofluoric Acid Monitor / CM-200/210
iconIn-line Particle Sensor (Chemicals/Resist) / PLCA-800
iconLow Concentration HF Monitor / HF-96
iconIn-line Type Dissolved Ozone Monitor / OZ-96i
iconDissolved Ozone Monitor / OZ-96
iconHydrofluoric Acid Resistant pH Meter / CP-480
iconpH Meter for Slurry  / OP-96F
iconSlurry Monitor / DE-100
iconTwo-channel Resistivity Meter / GC-96RW
iconCarbon Sensor Resistivity Meter / GC-96R
iconIPA Resistivity Meter / IP-960
iconTwo-channel Conductivity Meter  / OE-96CW
iconCarbon Sensor Conductivity Meter / CE-480C-GC
iconTMAH Conductivity Meter / CEH-480TM
iconAmmonia Concentration Meter / ON-96
iconDigital Liquid Mass Flow Meter / Controller / LF / LV Series
iconKarman's Vortex System Liquid Flow Meter / LK Series


Gas Control/Analysis (Dry Process)
iconFTIR Gas Analyzer / FG-100 Series
iconIn-line Gas Monitor / IR-150
iconAuto Pressure Regulator / UR-7300 Series
iconDirect injection / VC Series
iconMass flow controllers / SEC-4001 / 8000 Series
iconDigital Mass Flow Controller / SEC-Z/F/V Series
iconDeviceNet™ compatible digital mass flow controllers / SEC-Z10D/Z10DW Series
iconCompact baking system / LSC-A100 Series


Process Monitoring (Dry Process)
iconResidual Gas Analyzer / MICROPOLE™ System
iconCapacitance Manometers / VG Series


Thin Film Control/Analysis
iconReal Time Interferometric Process Monitor / DIGILEM
iconPlasma Diagnosis Endpoint Monitor / PlasmaScope
iconPlasma Etching Total Control System / MULTISEM 550
iconFull Automatic Spectroscopic Ellipsometer / UT-300
iconUV-Visible Ellipsometer / UVISEL
iconInfrared Spectroscopic Ellipsometer / ex-situ IREL


CMP Process
iconParticle Size Distribution Analyzer / LA-920
iconDynamic Light Scattering Particle Size Distribution Analyzer / LB-550


Drain Water Analysis
iconFluoride Ion Monitor / FLIA-101
iconTotal Nitrogen/Total Phosphorus Measurement System / TPNA-300


Ambient Monitoring in Clean Room
iconAmbient Gas Monitor / AP Series APOA-370 / APNA-370



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