In-line Particle Sensor (Ultra-pure Water) / PLCA-800

Silica Monitor / SLIA-300

Silica Analyzer / SLIA-2000

Dissolved Oxygen Monitor / SD-300

Resistivity Meter / OE-96R/960CE

Fiber Optic Type Chemical Solution Concentration Monitor / CS-100F1 Series

SC-1 Monitor / CS-131

SC-2 Monitor / CS-152

SPM Monitor / CS-150

BHF Monitor / CS-137

HF/HNO₃ Monitor / CS-153N

FPM Monitor / CS-153

TMAH/H₂O₂ Monitor / CS-139E

Hydrofluoric Acid Monitor / CM-200/210

In-line Particle Sensor (Chemicals/Resist) / PLCA-800

Low Concentration HF Monitor / HF-96

In-line Type Dissolved Ozone Monitor / OZ-96i

Dissolved Ozone Monitor / OZ-96

Hydrofluoric Acid Resistant pH Meter / CP-480

pH Meter for Slurry  / OP-96F

Slurry Monitor / DE-100

Two-channel Resistivity Meter / GC-96RW

Carbon Sensor Resistivity Meter / GC-96R

IPA Resistivity Meter / IP-960

Two-channel Conductivity Meter  / OE-96CW

Carbon Sensor Conductivity Meter / CE-480C-GC

TMAH Conductivity Meter / CEH-480TM

Ammonia Concentration Meter / ON-96

Digital Liquid Mass Flow Meter / Controller / LF / LV Series

Karman's Vortex System Liquid Flow Meter / LK Series

FTIR Gas Analyzer / FG-100 Series

In-line Gas Monitor / IR-150

Auto Pressure Regulator / UR-7300 Series

Direct injection / VC Series

Mass flow controllers / SEC-4001 / 8000 Series

Digital Mass Flow Controller / SEC-Z/F/V Series

DeviceNet™ compatible digital mass flow controllers / SEC-Z10D/Z10DW Series

Compact baking system / LSC-A100 Series

Residual Gas Analyzer / MICROPOLE™ System

Capacitance Manometers / VG Series

Real Time Interferometric Process Monitor / DIGILEM

Plasma Diagnosis Endpoint Monitor / PlasmaScope

Fluoride Ion Monitor / FLIA-101

Total Nitrogen/Total Phosphorus Measurement System / TPNA-300

Full Automatic Film Analyzer / FF-1000

UV-Visible Ellipsometer / UVISEL

Energy Dispersive X-ray Analyzer / EMAX ENERGY

X-ray Microscope / XGT-5000

Glow Discharge Optical Emission Spectroscopy / JY-5000RF

Ambient Gas Monitor / AP Series APOA-370 / APNA-370