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Gas Monitoring Instrumentation
Mass Flow Controller
Auto-recharge system /
LU-A100series
Direct injection /
VC Series
Auto Pressure Regulator /
UR-7300 Series
In-line Gas Monitor /
IR-150
FTIR Gas Analyzer /
FG-100 Series
Residual Gas Analyzer /
MICROPOLE™ System
Capacitance Manometers /
VG Series
Exhaust Control System /
EC Series
Ozone Alarm
Ambient Gas Monitor /
GA-360E
Thickness Instrumentation
Spectroscopic Ellipsometer /
UVISEL
Real Time Interferometric Process Monitor /
DIGILEM
Plasma Diagnosis Endpoint Monitor /
PlasmaScope
Instrumentation for Solutions used in the Process
SPM Monitor /
CS-150
SC-1 Monitor /
CS-131
Hydrofluoric Acid Monitor /
CM-200/210
SC-2 Monitor /
CS-152
BHF Monitor /
CS-137
FPM monitor /
CS-153
In-line Particle Sensor (Chemicals/Resist) /
PLCA-800
Pure Water Instrumentation
Dissolved Oxygen Monitor /
SD-300
Silica Monitor /
SLIA-300
In-line Particle Sensor (Ultra-pure Water) /
PLCA-800
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