The PLCA-800 counts the number of particles found in the various solutions used in the semiconductor fabrication process. In particular, the wet cleaning process is an effective way of removing particles. In this connection, sensors that can detect particles in liquids in real time are becoming an indispensable part of the process. The PLCA-800 is an ideal sensor for the in-line measurement of particles in solutions and resists.

The PLCA-800 can be integrated into process equipment.

The system can detect particles as small as 0.2 µm in diameter.

Through in-line measurement, minute changes in test materials can be detected immediately.