Inline Particle Sensor for Ultra-Pure Water
PLCA-800 Series
A compact design for inline measurement at up to 10 locations with
a minimum measurable particle size of 0.1 µm.
The PLCA-800 series inline particle sensors have
been designed to count the particles in ultra-pure water used in
semiconductor and liquid crystal manufacturing processes, and displaying
the results on a monitor in real-time. Although the models in the
series are compact sensors, they can detect particles as small as
0.1 µm in diameter. Rapid response to subtle changes in samples
is also available. Since the PLCA-800 series can be placed at up
to ten different locations, these sensors make centralized multiple-location
measurement easy. The measured data can be collected and saved to
PC, and can be easily edited. The PLCA-800 series are the most ideal
particle sensors, enabling multi-point measurement anywhere required
in the face of stringent demands for an ultra-pure water production
line.
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Sensor module
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PLCA-800Q / PLCA-801Q
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Utility module
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PLCA-850
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Software
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PLCA-880
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Sampling unit
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PLCA-SP-1A (option)
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A host of functions coupled with the ease of
use for optimum measurement under all conditions
A compact design that integrates right into existing production
lines The compact (105 x 93 x 89 mm) and lightweight
sensors can easily be integrated with other equipment used in the
production process. Since they can be placed at up to ten different
locations, these sensors make centralized multiple-location measurement
easy.
Inline measurement with rapid response to subtle changes in ultra-pure
water Inline measurement allows for constant monitoring
of ultra-pure water manufacturing processes, so quick response to
the most minute fluctuations in particle levels is possible.
A general-purpose system yet capable of measuring particles as small
as 0.1 µm in diameter The PLCA-800's highly sensitive detection system
can count particles as small as 0.1 µm in diameter. It
combines the high-precision measurement capabilities demanded by
the semiconductor production process with an economical price.
Two RS485 ports (up to 50 meters) provided for connection to the
utility module RS485 ports are provided for sending power and
signals to up to 10 inline particle sensors from the utility module.
The cable from each utility module RS485 port can be up to 50 m
in length, so when both ports are used, sensors can be placed up
to 100 m apart.
Line operation and measurement results are displayed on a PC screen
for easy data collection and editing A program for displaying the measurement results
from up to 10 sensors on a PC is available. Unneeded sensors can
be left idle according to the operational requirements of the line,
and the collected measurement data can be saved in the text format
for editing using a spreadsheet program.
Main applications · Ultra-pure water control in the
semiconductor manufacturing process.
· Ultra-pure water control in the LC manufacturing process.
· Ultra-pure water control in the ultra-clean parts-cleaning process.
System configuration
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