Equipment weight |
Approximately 1000 kg |
Equipment dimensions |
W1710 x D1350 x H1540 mm
(Drive display indicating lamp included:H 2055 mm) |
Power capability |
AC200/220/230/240±10V 4 KVA 50/60Hz (Specify the power electric pressure.) |
Vacuum source |
Over 80 Kpa (600 mm Hg)
Approximately 50 liters/min. |
Exhaust requirements |
Total 5.4 m3/min.
(Exhaust outlets X 3: each 1.8 m3/min hot exhaust use) |
Floor vibrations |
under 0.02 G RMS/0.2 mm EQp-p (reference values)
(Frequency: 8.6 Hz, amplitude 200µm) |
Installation location |
class 10 clean bench or clean room (Temperature 20 to 25 °C with a set temperature with settings ±1°C) |
Maintenance space |
over 600 mm outside of the equipment |
