Efficiently provides particle detection with high throughput
In semiconductor plants, where high performance and demanding functionality are required, the HORIBA PD Series' high operating rate and long-term dependability have earned it a solid reputation. Inheriting a transfer system that has proven to provide stable, high performance and superior throughput over long operating periods, the PR-PD2HR now offers the most sensitive detection in the series with exclusive signal processing that can detect particles as small as 0.35 µm.
Compatible with any stepper case, the PR-PD2HR features a multi-stage sorter that can handle up to 10 cassettes and supports all communication protocols. True to its colors as a member of the PD Series it boasts high capability over a broad range of general reticle and mask particle detection tasks, and goes on by being able to evaluate glass or pellicle surfaces with high throughput. The PR-PD2HR will prove its worth by contributing to yield improvements in any semiconductor fabrication facility.
