Principle |
Polarized laser scattering method |
Inspection object |
Reticle/mask with or without pellicle |
Detector |
Photomultiplier |
Light source |
Argon laser 488 nm, 10 mW |
Reticle/mask size |
5" x 5", 6" x 6", 2.3 to 6.3 mm thickness (maximum 1/4")
Option: 3" x 5", 7" x 7", Ø7-1/4 with holder, 230 mm |
Pellicle |
Thickness: 0.865 to 2.85 µm (±0.2 µm)
Frame height:
Glass surface (upper): 2.5 to 4.0 mm
Pattern surface (lower): 2.5 to 6.3 mm
Frame size: Differs depend on reticle case. |
Detectable particle size |
Pattern surface: 0.35 µm or lager
Glass surface: 5 µm or lager
Pellicle surface: 10 µm or lager
(PSL equivalent diameter) |
Detectability |
Standard mode: More than 90% of 0.35 µm particles.
5-inspection integrated mode: More than 93% of 0.35 µm particles. |
Particle level setting |
Pattern surface: 0.25 to 10 (3 steps)
Glass surface: 1.5 to 30.0 (3 steps)
Pellicle surface: 4 to 99 (3 steps) |
Inspection area |
Shape: Square, rectangle, circle
Area:
5" x 5": 10 x 10 to 105 x 110 mm or
Ø10 to Ø105 mm
6" x 6": 10 x 10 to 127 x 139 mm or
Ø10 to Ø127 mm
7" x 7": 10 x 10 to 160 x 160 mm or
Ø10 to Ø160 mm (Option)
Actual inspection area differs with reticle support stage and pellicle size. (7", 230 mm Option) |
Inspection result |
LCD display:
Map: Results for the entire inspection area, and results of magnifying the main map with X-Y coordinates for particle positions. |
Particle observation |
LCD screen observed from top and bottom side.
Magnification: 220 x, 440 x, 1100 x (bottom side) 440 x fixed (top side)
Illumination: Bright/dark-field illumination, combined with top light. |
Standard function |
Automatic review (skip) function, Coordinate origin setting/rotation compensation function, Inspection center function, Map display insert/delete function, Bar code ready (Hard ware option) |
Optional functions |
Pellicle only inspection, Mask blank inspection, Inspection of additional substrate size, 2 way data communication (GEM or SECS2) |
Dimensions |
1710 (W) x 1540 (H) x 1400* (D) mm
67.3 (W) x 60.6 (H) x 55.1* (D) in.
*Maximum width including a status lamp and a duct. |
Weight |
Approx. 1000kg/2222 lbs |
