·  CS-1 Monitor

·  CS-2 Monitor

·  FPM Monitor

·  BHF Monitor

·  HF/HNO₃ Monitor

·  TMAH/H₂O₂Monitor

·  CPM Monitor

·  Hydrofluoric Acid monitor

·  HF Concentration Monitor
in Diluted sulfuric acid/Hydrogen peroxide

·  Fiber Optic Type Chemical Solution Concentration Monitor

·  IPA Gas Concentration Monitor

·  Low-concentration type HF/HCl/NH₃ Concentration Monitor

·  Dissolved Ozone Monitor

·  Carbon Sensor Resistivity Meter

·  2-Channel Carbon Sensor Resistivity Meter

·   Resistivity Meter

·  Conductivity Meter (Low Concentration Type)

·  Conductivity Meter (High Concentration Type)

·  TMAH Conductivity Meter

·  Digital Liquid Mass Flow Meter/Controller

·  Fluoride Analyzer

·  Free Fluoride Ion Monitor

·  Total Nitrogen/Total Phosphorus Measurement System

·  Full Automatic Film Analyzer

·  Spectroscopic Ellipsometer

·  Full Automatic Ultra Thin Film Analyzer

·  Visible Spectroscopic Ellipsometer

·  Full Automatic Raman Analyzer

·  Real Time Interferometric Process Monitor

·  Plasma Diagnosis Endpoint Monitor

·  Real Time Interferometric Process Monitor

·  FPD Mask Particle Detection System

·  Trace Ammonia Gas Monitor

·  Residual Gas Analyzer

·  FTIR Gas Analyzer

·  Auto Pressure Regulator

·  In-line Gas Monitor

IR-150S/150L

·  High Performance Mass Flow Controller

·  Wafer back side cooling system

·  Liquid Source Auto Recharge System

·  Mixed injection/Direct injection system

·  Compact baking system

·  In-line Particle Sensor (Ultra-pure Water)

·  Silica Analyzer

·  High-sensitivity Silica Monitor

·  Dissolved Oxygen Monitor

·  Dissolved Oxygen Monitor