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Thin Film Analysis
·  Full Automatic Film Analyzer
 
FF-1000 Series
·  Spectroscopic Ellipsometer
 
UVISEL Series
 
·  Full Automatic Ultra Thin Film Analyzer
 
UT-300
 
·  Visible Spectroscopic Ellipsometer
 
MM-16
 
 
·  Full Automatic Raman Analyzer
FR-3000
     
         

Measurement/Etching Control
·  Real Time Interferometric Process Monitor
 
LEM-CT670
·  Plasma Diagnosis Endpoint Monitor
 
DigiCPM_J
 
·  Real Time Interferometric Process Monitor
 
DIGILEM-CPM-Xe/Halogen
     
         


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