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Highly reliable analysis systems for supporting
the evolution of FPDs in a wide range of processes


HORIBA is applying its advanced semiconductor technologies to the field of FPDs.
The HORIBA Group has fostered various analysis and evaluation technologies for silicon semiconductor manufacturing processes, a field where strict specifications must be satisfied.
HORIBA is now making full use of these technologies in the field of FPD processing.
These technologies of course provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks, and thin film measurement.
These technologies are also being applied to high-performance analytical equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

·  Please click on the process for further information.

 
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Chemical Analysis
·  CS-1 Monitor
 
CS-131
·  CS-2 Monitor
 
CS-152
 
·  FPM Monitor
 
CS-153
 
·  BHF Monitor
 
CS-137
 
 
·  HF/HNO3 Monitor
CS-153N
 
·  TMAH/H2O2Monitor
CS-139E
 
 
·  CPM Monitor
 
CS-150
 
·  Hydrofluoric Acid monitor
CM-200A/210A
 
 
·  HF Concentration Monitor
in Diluted sulfuric acid/Hydrogen peroxide
 
HF-700
 
·  Fiber Optic Type Chemical Solution Concentration Monitor
 
CS-100F1 Series
 
 
·  IPA Gas Concentration Monitor
 
IR-150AS
 
·  Low-concentration type HF/HCl/NH3 Concentration Monitor
 
HF-960M
 
 
·  Dissolved Ozone Monitor
HZ-960
 
·  Carbon Sensor Resistivity Meter
 
HE-960R-GC
 
 
·  2-Channel Carbon Sensor Resistivity Meter
HE-960RW-GC
 
·   Resistivity Meter
 
HE-480R
 
 
·  Conductivity Meter (Low Concentration Type)
 
HE-480C
 
·  Conductivity Meter (High Concentration Type)
 
HE-480H
 
 
·  TMAH Conductivity Meter
 
HE-960TM
 
·  Digital Liquid Mass Flow Meter/Controller
 
LF-F/LV-F Series
 
         

Drain Water Analysis
·  Fluoride Analyzer
 
FLIA-101
·  Free Fluoride Ion Monitor
 
IF-250
 
·  Total Nitrogen/Total Phosphorus Measurement System
TPNA-300
     
         

Thin Film Analysis
·  Full Automatic Film Analyzer
 
FF-1000 Series
·  Spectroscopic Ellipsometer
 
UVISEL Series
 
·  Full Automatic Ultra Thin Film Analyzer
 
UT-300
 
·  Visible Spectroscopic Ellipsometer
 
MM-16
 
 
·  Full Automatic Raman Analyzer
FR-3000
     
         

Measurement/Etching Control
·  Real Time Interferometric Process Monitor
 
LEM-CT670
·  Plasma Diagnosis Endpoint Monitor
 
DigiCPM_J
 
·  Real Time Interferometric Process Monitor
 
DIGILEM-CPM-Xe/Halogen
     
         

Lithography Process
·  FPD Mask Particle Detection System
PR-PD4
·  Trace Ammonia Gas Monitor
 
CG-1000
         

Vacuum Measurement
 
·  Residual Gas Analyzer
 
MICROPOLE™ System
     
         

Gas Control/Analysis
 
·  FTIR Gas Analyzer
 
FG-100A Series
·  Auto Pressure Regulator
 
UR-7340/7350 Series
 
 
·  In-line Gas Monitor
 
IR-150S/150L
 
·  High Performance Mass Flow Controller
 
SEC-Z500X Series
 
 
·  Wafer back side cooling system
GR-300 Series
 
·  Liquid Source Auto Recharge System
LU-A1100 Series
 
 
·  Mixed injection/Direct injection system
 
MI/MV/ VC Series
 
·  Compact baking system
 
LSC-A100 Series
 

DI Water Analysis
 
·  In-line Particle Sensor (Ultra-pure Water)
 
PLCA-800
 
·  Silica Analyzer
 
SLIA-2000
 
 
·  High-sensitivity Silica Monitor
 
SLIA-300
 
·  Dissolved Oxygen Monitor
 
SD-300
 
 
·  Dissolved Oxygen Monitor
HE-960RW
     
         

Material Analysis (Particulates Analysis & Defect Analysis)
 
·  Energy Dispersive X-ray Analyzer
 
EMAX ENERGY EX-200/300/400
 
·  X-ray Microscope
 
XGT-5000 series
 
 
·  Glow Discharge Optical Emission Spectroscopy
GD-Profiler 2
 
·  Raman Microscopy
LabRAM ARAMIS
 
         

Ambient Monitoring in Clean Room
·  Airborne Molecular Contaminants Monitor
TG-500 Series
 
         



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