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List by Production Process

Front-end Process
Front-end Process
Lithography Process
·
Reticle/Mask Particle Detection System
 
PR-PD2HR
·
Reticle/Mask Particle Detection System
 
PR-PD2
·
Reticle/Mask Particle Detection System
 
PR-PD3
·
Reticle/Mask Particle Detection System
 
PR-PD5
·
FPD Mask Particle Detection System
 
PR-PD4
·
Automatic Particle Blower
 
RP-1
·
Trace AmmoniaGas Monitor
 
CG-1000
   
             

Material Analysis (Particulates Analysis & Defect Analysis)
·
Energy Dispersive X-ray Analyzer
 
EMAX ENERGY
·
X-ray Microscope
 
XGT-5000
 
·
Glow Discharge Optical Emission Spectroscopy
 
GD-Profiler Series
 
·
Raman Spectrophotometer
 
LabRAM ARAMIS
 
             

DI Water Analysis (Wet Process)
·
In-line Particle Sensor (Ultra-pure Water)
 
PLCA-800
·
Dissolved Oxygen Monitor
 
SD-300
 
·
Silica Monitor
 
SLIA-300
 
·
2-Channel Resistivity Meter
 
HE-960RW
 
 
·
Silica Analyzer
 
SLIA-2000
       
         
Pure Water Instrumentation icon
  

Chemical Analysis (Wet Process)
·
SC-1 Monitor
 
CS-131
·
Dissolved Ozone Monitor
 
HZ-960
 
·
SC-2 Monitor
 
CS-152
 
·
High Sensitive HF Concentration Monitor in Diluted sulfuric acid / Hydrogen Peroxide
 
HF-700
 
 
·
SPM Monitor
 
CS-150
 
·
2-Channel Carbon Sensor Resistivity Meter
 
HE-960RW-GC
 
 
·
BHF Monitor
 
CS-137
 
·
Carbon Sensor Resistivity Meter
 
HE-960R-GC
 
 
·
HF/HNO3Monitor
 
CS-153N
 
·
Resistivity Meter
 
HE-480R
 
 
·
FPM Monitor
 
CS-153
 
·
Conductivity Meter (High Density Type)
 
HE-480H
 
 
·
TMAH/H2O2 Monitor
 
CS-139E
 
·
Conductivity Meter (Low Density Type)
 
HE-480C
 
 
·
Fiber Optic Type Chemical Solution Concentration Monitor
 
CS-100F1 Series
 
·
TMAH Conductivity Meter
 
HE-960TM
 
 
·
Hydrofluoric Acid Monitor
 
CM-200/210
 
·
Liquid Mass Flow Meter/Controller
 
LF-F/LV-F Series
 
 
·
IPA Gas Concentration Monitor
 
IR-150AS
 
·
HF/HCL/NH3 Concentration Monitor
 
HF-960M
 
         
Instrumentation for Solutions used in the Process icon
  

Gas Control/Analysis (Dry Process)
·
FTIR Gas Analyzer
 
FG-100A Series
·
Digital Mass Flow Controller
 
SEC-Z500X Series
 
·
In-line Gas Monitor
 
IR-150S/150L
 
·
Vaporized Liquid Source Control System
 
MI/MV / VC Series
 
LSC-A100 Series
 
 
·
Automatic Pressure Regulator
 
UR-7340/7350 Series
 
·
Liquid Source Auto Recharge System
 
LU-A1000 Series
 
 
·
Wafer back side cooling system
 
GR-300 Series
       
         
Gas Monitoring Instrumentation icon
  

Process Monitoring (Dry Process)
·
Residual Gas Analyzer
 
MICROPOLE™ System
   
             

Thin Film Control/Analysis
·
Real Time Interferometric Film Thickness Monitor
 
LEM-CT670
·
Real Time Interferometric Process Monitor
 
DIGILEM-CPM-Xe/Halogen
·
Plasma Diagnosis Endpoint Monitor
 
DigiCPM_J
·
Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor
 
MULTI CPM
 
·
Spectroscopic Ellipsometer
 
UVISEL
 
·
Visible Spectroscopic Ellipsometer
 
MM-16
 
 
·
Spectroscopic Ellipsometer
 
FF-1000
 
·
Full Automatic Spectroscopic Ellipsometer
 
UT-300
 
 
·
Full Automatic Raman Analyzer
 
FR-3000
       
             

Drain Water Analysis
·
Fluoride Ion Monitor
 
FLIA-101
·
Free Fluoride Ion Monitor
 
IF-250
 
·
Total Nitrogen/Total Phosphorus Measurement System
 
TPNA-300
       
             

CMP Process
·
Laser Scattering Particle Size Distribution Analyzer
 
LA-950
·
Dynamic Light Scattering Particle Size Distribution Analyzer
 
LB-550
             


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