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Lithography Process
·
Reticle/Mask Particle Detection System
PR-PD2 HR
·
Reticle/Mask Particle Detection System
PR-PD2
·
Reticle/Mask Particle Detection System
PR-PD3
·
Reticle/Mask Particle Detection System
PR-PD5
·
FPD Mask Particle Detection System
PR-PD4
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Automatic Particle Blower
RP-1
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Trace Ammonia Gas Monitor
CG-1000
Material Analysis
·
Photoluminescence Spectrophotometer
·
Cathode Luminescence Measuring Equipment
MP Series
Material Analysis (Particulates Analysis & Defect Analysis)
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Energy Dispersive X-ray Analyzer
EMAX ENERGY
·
X-ray Microscope
XGT-5000
·
Glow Discharge Optical Emission Spectroscopy
GD-Profiler 2
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Raman Spectrophotometer
LabRAM ARAMIS
DI Water Analysis (Wet Process)
·
In-line Particle Sensor (Ultra-pure Water)
PLCA-800
·
Dissolved Oxygen Monitor
SD-300
·
Silica Monitor
SLIA-300
·
2-Channel Resistivity Meter
HE-960RW
·
Silica Analyzer
SLIA-2000
Pure Water Instrumentation
Drain Water Analysis
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Fluoride Ion Monitor
FLIA-101
·
Free Fluoride Ion Monitor
IF-250
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Total Nitrogen/Total Phosphorus Measurement System
TPNA-300
Gas Control/Analysis (Dry Process)
·
FTIR Gas Analyzer
FG-100A Series
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Digital Mass Flow Controller
SEC-Z500X Series
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In-line Gas Monitor
IR-150S/150L
·
Vaporized Liquid Source Control System
MI/MV
/
VC Series
LSC-A100 Series
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Automatic Pressure Regulator
UR-7340/7350 Series
·
Liquid Source Auto Recharge System
LU-A1000 Series
·
Wafer back side cooling system
GR-300 Series
Gas Monitoring Instrumentation
Process Monitoring (Dry Process)
·
Residual Gas Analyzer
MICROPOLE™ System
Thin Film Control/Analysis
·
Real Time Interferometric Film Thickness Monitor
LEM-CT670
·
Real Time Interferometric Process Monitor
DIGILEM-CPM-Xe/Halogen
·
Plasma Diagnosis Endpoint Monitor
DigiCPM_J
·
Simultaneous Real Time Multi - Chamber - Multi diagnosis monitor
MULTI CPM
·
Spectroscopic Ellipsometer
UVISEL
·
Visible Spectroscopic Ellipsometer
MM-16
·
Spectroscopic Ellipsometer
FF-1000
·
Full Automatic Spectroscopic Ellipsometer
UT-300
·
Full Automatic Raman Analyzer
FR-3000
Chemical Analysis (Wet Process)
·
SC-1 Monitor
CS-131
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Dissolved Ozone Monitor
HZ-960
·
SC-2 Monitor
CS-152
·
High Sensitive HF Concentration Monitor in Diluted sulfuric acid / Hydrogen Peroxide
HF-700
·
SPM Monitor
CS-150
·
2-Channel Carbon Sensor Resistivity Meter
HE-960RW-GC
·
BHF Monitor
CS-137
·
Carbon Sensor Resistivity Meter
HE-960R-GC
·
HF/HNO
3
Monitor
CS-153N
·
Resistivity Meter
HE-480R
·
FPM Monitor
CS-153
·
Conductivity Meter (High Density Type)
HE-480H
·
TMAH/H
2
O
2
Monitor
CS-139E
·
Conductivity Meter (Low Density Type)
HE-480C
·
Fiber Optic Type Chemical Solution Concentration Monitor
CS-100F1 Series
·
TMAH Conductivity Meter
HE-960TM
·
Hydrofluoric Acid Monitor
CM-200/210
·
Liquid Mass Flow Meter/Controller
LF-F/LV-F Series
·
IPA Gas Concentration Monitor
IR-150AS
·
HF/HCL/NH
3
Concentration Monitor
HF-960M
Instrumentation for Solutions used in the Process
CMP Process
·
Laser Scattering Particle Size Distribution Analyzer
LA-950
·
Dynamic Light Scattering Particle Size Distribution Analyzer
LB-550
Ambient Monitoring in Clean Room
·
Ambient Monitoring in Clean Room
TG-500 Series
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