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Wafer Fabrication Process

Wafer Fabrication Process
Material Analysis
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Photoluminescence Spectrophotometer
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Cathode Luminescence Measuring Equipment
 
MP Series
             

Material Analysis (Particulates Analysis & Defect Analysis)
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Energy Dispersive X-ray Analyzer
 
EMAX ENERGY
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X-ray Microscope
 
XGT-5000
 
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Glow Discharge Optical Emission Spectroscopy
 
GD-Profiler Series
 
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Raman Spectrophotometer
 
LabRAM ARAMIS
 
             

DI Water Analysis (Wet Process)
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In-line Particle Sensor (Ultra-pure Water)
 
PLCA-800
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Dissolved Oxygen Monitor
 
SD-300
 
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Silica Monitor
 
SLIA-300
 
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2-Channel Resistivity Meter
 
HE-960RW
 
 
·
Silica Analyzer
 
SLIA-2000
       
         
Pure Water Instrumentation icon
 


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