Impurity Control
	•	Oxygen/Nitrogen Analyzer   EMGA-620		•	Particle Size Distribution Analyzer LA-950V2		•	Hydrogen Analyzer   EMGA-621W
	•	ICP Emission Spectrometer   ULTIMA 2		•	Carbon/Sulfur Analyzer   EMIA-920V

Material Analysis
	•	PL Measuring Equipment*   Photoluminor		•	X-ray Analytical Microscope   XGT-5000 Series		•	Energy Dispersive X-ray Analyzer   EMAX ENERGY
	•	Raman Spectroscopy System*   LabRAM ARAMIS		•	Glow Discharge Optical Emission Spectroscopy* GD-Profiler 2

DI Water Analysis
	•	Silica Monitor**   SLIA-300		•	For Ultra-pure Water Resistivity Meter**   HE-960RW		•	Silica Analyzer   SLIA-2000
	•	Dissolved Oxygen Monitor**   SD-300
								Dl Water Analysis

Thin Film Control/Analysis
	•	Real Time Interferometric Film Thickness Monitor*   LEM-CT670		•	Spectroscopic Ellipsometer*   UVISEL		•	Full Automatic Film Analyzer   FF-1000
	•	Real Time Interferometric Film Thickness Monitor*   DIGILEM-CPM-Xe/Halogen		•	Visible Spectroscopic Ellipsometer* MM-16		•	Full Automatic Spectroscopic Ellipsometer   UT-300
	•	Plasma Diagnosis Endpoint Monitor*   DigiCPM_J		•	Full Automatic Raman Analyzer FR-3000

Drain Water Analysis
	•	Fluoride Ion Monitor   FLIA-101		•	Total Nitrogen/ Total Phosphorus Measurement System   TPNA-300		•	Free Fluoride Ion Monitor**   IF-250

Chemical Analysis
	•	Fiber Optic Type Chemical Solution Concentration Monitor   CS-100F1 Series		•	IPA GAS Concentration Monitor   IR-150AS		•	Resistivity Meter**   HE-480R
	•	Chemical Solution Concentration Monitor   CS-100 Series		•	Low Concentration HF/HCl/NH3 Monitor**   HF-960M		•	Conductivity Meter**   HE-480 Series
	•	Hydrofluoric Acid Monitor   CM-200/210		•	Dissolved Ozone Monitor** HZ-960		•	Liquid Mass Flow Meter/Controller***   LF-F/LV-F Series
								Chemical Solutions Analysis

Gas Control/Analysis/Process Monitoring
	•	Digital Mass Flow Controller***   SEC-Z500X Series		•	Mass Flow Controller***   SEC-E40 Series		•	Automatic Pressure Regulator***   UR-7340/7350 Series
	•	Vaporized Liquid Source Control System***   LSC-A100 Series		•	Liquid Source Auto Recharge System***   LU-A1000 Series		•	Residual Gas Analyzer***   MICROPOLE™ System
	•	FTIR Gas Analyzer   FG-100A Series
								Gas Control/Analysis