Job Setup
Various measurement recipes can be set by the engineer for each wafer port (four shown here) .

Cassette Trend Graph
The graph shows 25 wafers per lot horizontally and their thickness vertically. The film thickness control values can be set in two steps with blue and red lines. Measurements are shown in red if the control value is exceeded and in green if it is met.

Current Wafer Map View
Results at the measuring point are displayed in color.
Red: Thickness control value is exceeded
Green: Thickness control value is met

Measuring Status
The wafer measuring process is diaplayed in real time on the visual screen.