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UT-300
Specifications
Phase modulation by PEM element
Typical system configurations
Operation / result display example

Full Automatic Ultra Thin Film Analyzer
UT-300

Typical system configurations

300 mm FOUP single
300 mm FOUP double
300 mm FOUP single 300 mm FOUP double
200 mm open cassette compatible
  
200 mm open cassette compatible  


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